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| VMC3020D | VMC4030D | VMC5040D | |
| Test distance(mm) X Y Z | 300x200x200 | 400x300x200 | 500x400x200 |
| Weight (kg) | 250 | 350 | 500 |
| Load capacity | 15kg | ||
X Y axis accuracy(μm) | ≤3+L/200(L is the unit of measure mm) | ||
| Z-axis accuracy (μm) | ≤3+L/100(L is the unit of measure mm) | ||
| Working Distance | 82mm | ||
| Resolution | 0.1μm | ||
| Objective magnification | 0.7X-4.5X | ||
| Composite Multiple | 20~128X | ||
| Control System | CNC CLOSED-LOOP CONTROL system | ||
| Lighting System | Surface light source and transmission light source are LED, brightness adjustable | ||
| Computer | Windows 7 | ||
